F06700 - SEMI F67 - Test Method for Determining Inert Gas Purifier Capacity Lang-Japanese 1 This Guide provides the

1  This Guide provides the tools to describe individual wafers in a 3DS-IC process

SEMI G73-0997 (Reapproved 1104)

This method is for UHP efficient removal of low-level contaminants

field level(s)

F06700 - SEMI F67 - Test Method for Determining Inert Gas Purifier Capacity Lang-Japanese 1 This Guide provides theThis Standard was technically approved by the Gases Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on June 4, 2013. Available at www. semiviews. org and www. semi. org in July 2013; originally published November 2001; previously published November 2008. The purpose of this Document is to define a test method to quantify impurity removal capacity of inert gas purifiers. To determine